Microelectromechanical systems—or MEMS—were a $12 billion business in 2014. But that market is dominated by just a handful of devices, such as the accelerometers that reorient the screens of most smartphones.
That’s because manufacturing MEMS has traditionally required sophisticated semiconductor fabrication facilities, which cost tens of millions of dollars to build. Potentially useful MEMS have languished in development because they don’t have markets large enough to justify the initial capital investment in production.
Two recent papers from researchers at MIT’s Microsystems Technologies Laboratories offer hope that that might change. In one, the researchers show that a MEMS-based gas sensor manufactured with a desktop device performs at least as well as commercial sensors built at conventional production facilities.
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